Daniel Herr

The Joint School of Nanoscience and Nanoengineering,
208H JSNN, 2907 East Gate City Blvd, Greensboro, NC 27401, USA

Daniel Herr PhotoDr. Herr is a pioneer in collaborative nanotechnology research. He is the Director of Semiconductor Research Corporation’s [SRC’s] Nanomanufacturing Sciences area, leading an international team that provides vision, guidance, and leveraged support for a number of the top interdisciplinary, nanoelectronics related, university research programs. He also serves as Adjunct Associate Professor in Materials Science and Engineering at North Carolina State University, where he co-teaches a graduate level course on The Materials Science of Nanoelectronics. He founded a quality engineering start-up that enabled rapid and robust, custom product, material, and process design. His suite of applied optimization tools is significantly more robust than Taguchi’s methodology. More recently, he was elected to serve as the AAAS Industrial Science and Technology section’s Member-at-Large, and Fellow of the International Society for Optical Engineering for the design, development, and commercialization of two early families of chemically amplified resists. He is the inventor of several foundational patents and disclosures on defect tolerant patterning, controlled nanotube synthesis and placement, deterministic semiconductor doping, and ultimate CMOS devices. As founding co-chair of the International Technology Working Group on Emerging Research Materials, Dr. Herr provides ongoing technical leadership for the International Technology Roadmap for Semiconductors [ITRS] community. He also serves as Senior Editor for IEEE Transactions in Nanotechnology, Coordinating Editor for the Journal of Nanoparticle Research, Reviewer for the Journal of Vacuum Science and Technology, and co-chair of several international technical conferences. He was as a contributing team member when SRC was awarded the 2005 National Medal of Technology.